DE102010005893A1 - Plant for producing ultra-pure water, comprises inlet for water to be purified, cleaning unit formed to reduce contamination load flowing through cleaning unit, and ultraviolet-irradiation device having ultraviolet -emitting light source - Google Patents

Abstract

The plant (1) comprises an inlet (11) for water to be purified, a cleaning unit (5) formed for reducing the contamination load flowing through the cleaning unit, an ultraviolet (UV)-irradiation device (17) having an UV-emitting light source, which is formed for irradiating the water flowing through the UV-irradiation device, an outlet, over which the resulting ultra-pure water is tapped from the plant, and a conducting system, which conducts the water from the inlet towards the outlet under the interconnection of cleaning unit and the UV-irradiation device. The plant (1) comprises an inlet (11) for water to be purified, a cleaning unit (5) formed for reducing the contamination load flowing through the cleaning unit, an ultraviolet (UV)-irradiation device (17) having an UV-emitting light source, which is formed for irradiating the water flowing through the UV-irradiation device, an outlet, over which the resulting ultra-pure water is tapped from the plant, and a conducting system, which conducts the water from the inlet towards the outlet under the interconnection of cleaning unit and the UV-irradiation device. The UV-emitting light source is an UV-LED. The UV-LED partially protrudes in the water flowing through the UV-irradiation device. The UV-irradiation device comprises several UV-LED, which are arranged next to each other and are rotatably arranged adjacent or opposite to each other regarding the cross-section of the conducting part of the UV-irradiation device flowing from the water. The UV-irradiation device comprises a measuring device and a control unit, where the measuring device is formed to determine total organic carbon content or the volume flow and the control unit is formed to regulate the irradiation intensity of the UV-irradiation device in dependent of the determined total organic carbon content or the volume flow. The UV-irradiation device includes irradiation chambers, which are arranged to each other in series, where the UV-LED is arranged in the irradiation chambers. The UV-LED of the UV-irradiation device is arranged in a flowing dead space of a connecting part, a cartridge input or cartridge output, a valve, a sensor or a pump (15). The UV-LED of the irradiation device is formed in such a way that it emits UV-light with a wavelength of 254 nm, 280 nm, 310 nm or 340 nm or 180-220 nm. The UV-irradiation device comprises two light sources emitting UV-light with different wavelength, where one light source emitting UV-light is the UV-LED. The plant has a replaceable cartridge. An independent claim is included for a cartridge useful in a plant for producing ultra-pure water.

Description

The invention relates to a plant for the production of ultrapure water, in particular of type I ultrapure water according to ASTM, the plant having at least one inlet for water to be purified, a purification unit designed to reduce the contamination load of the water flowing through the purification unit, a UV Irradiation device with at least one UV-emitting light source, which is designed to irradiate the water flowing through the UV irradiation device, and an outlet, via which the ultrapure water obtained can be tapped from the plant comprises. Furthermore, the plant for the production of ultrapure water has a conduit system which directs the water from the inlet with the interposition of cleaning unit and UV irradiation device to the outlet. The invention further relates to a cartridge for use in a plant for the production of ultrapure water.

Installations for the production of ultrapure water are used wherever water with a particularly high degree of purity is required. For example, ultrapure water plays a central role in numerous analysis and / or test applications. The relevant impurities depending on the field of use include, for example, suspended particles (sand, loam, etc.), colloids, inorganic ions (especially silicate, chloride, fluoride, bicarbonate, sulfate, phosphate, nitrate, etc.), dissolved organic impurities (for Proteins, alcohols, chloramines, pesticide residues, etc.), dissolved gases (especially carbon dioxide, nitrogen and oxygen), microorganisms (especially bacteria, fungi and algae), pyrogens (or bacterial endotoxins), viruses and nucleases. Organic contaminants are typically indicated by the TOC value. The TOC value is a sum parameter and reflects the load of water with organic matter. Methods for determining the TOC value are known from the prior art, in particular also for plants for producing ultrapure water. Depending on the purpose of the water specifically one or more of these impurity classes may be particularly problematic for the user.

Typically, water qualities are specified in the categories prescribed by the ASTM (American Society for Testing and Materials). Thereafter, type I water (electrical resistance of at least 18.0 MΩ cm at 298 K, TOC less than 50 ppb, sodium and chloride each less than 1 ppb and silicate less than 3 ppb) has the highest purity and is used, for example, in HPLC, In atomic absorption spectroscopy, in cell cultures etc .. The TOC value (total organic carbon) refers to the total content of organic carbon. Type II water (electrical resistance of at least 1.0 MΩ cm at 298 K, TOC less than 50 ppb, sodium and chloride each less than 5 ppb and silicate less than 3 ppb) is less pure and is used for example in serological and microbiological applications , Type III water (electrical resistance of at least 4.0 MΩ cm at 298 K, TOC of less than 200 ppb, sodium and chloride content in each case less than 10 ppb and silicate less than 500 ppb), however, is suitable for general use in qualitative laboratory analysis, for example in urinalysis, parasitological or histological examinations.

The basic structure of a plant for the production of ultrapure water (hereinafter also referred to as ultra-pure water plant) and the typically occurring components go, for example, from US 5,397,468 A , of the US 5,399,263 A and the EP 1 637 297 A2 , the contents of which are hereby incorporated by reference. Generic plants for the production of ultrapure water therefore comprise a water inlet through which the water to be purified is fed into the plant. Suitable for feeding water may also be untreated water. To improve the efficiency of the system and in particular to extend the service life, it is advantageous to use pretreated water, for example by distillation, reverse osmosis, ion exchange or similar processes. The water inlet is followed by a cleaning unit, in which the impurities contained in the water are gradually removed. The term purification unit is thus to be understood as meaning the entirety of the agents present for the removal of the abovementioned impurities. The cleaning unit is often constructed in multiple stages and may in its entirety, for example, the combination of several cleaning principles, such as adsorption, filtration, ion exchange, etc. include. It is also known to equip the plant for the production of ultrapure water with a UV irradiation device. The structure and the effect of the UV irradiation device will be specified in more detail below. Finally, for tapping off the water from the ultrapure water system, there is an outlet which, in order to achieve even higher-quality cleaning results, can be equipped, for example, with a separate filter unit (also referred to below as the final filter). These individual elements of a generic system for the production of ultrapure water are connected to one another via a line system which directs the water from the inlet with the interposition of cleaning unit and UV irradiation device to the outlet.

The largest range of variation have known plants for the production of ultrapure water with respect to the formation of the cleaning unit. For example, the cleaning units can comprise an absorption stage, in particular based on activated carbon. This is primarily for the removal of organic matter, chlorine, colloids, etc. Usually, there is also an ion exchange stage, via which anions and / or cations can be removed from the water. For this purpose, inter alia mixed resin beds with anion and cation exchangers, but also stepwise arrangements are used. Under cleaning unit is thus generally the part of the ultrapure water system to understand the impurities, in particular one or more of the above-exemplified relevant impurities, at least partially removed from the water to be purified. The cleaning unit also has a limited life because, for example, the exchange capacity of an ion exchanger or the absorption effect of an activated carbon filter stage is eventually exhausted. For this reason, the cleaning unit often includes one or more cartridges. Such a cartridge principle makes it possible to replace the cleaning unit in whole or in part quickly and easily as soon as the cleaning potential of the cleaning unit has been exhausted. In this case, the number of the respective cartridges and also the composition of the cleaning materials contained in the cartridges can vary. For the exact training and integration of the cartridges in the cleaning unit of a generic plant for the production of ultrapure water is also related to the US 5,397,468 A . US 5,399,263 A and the EP 1 637 207 A2 taken. In order to ensure pyrogen-free or no longer detectable pyrogen content, which is of particular importance, for example, especially in cell and tissue cultures, an ultrafiltration stage can also be present, which comprises, for example, polysulfone hollow fibers.

The UV irradiation device primarily serves to effectively kill all germs and, in particular with regard to the setting of a low TOC value, can be designed as a UV oxidation stage in a specific embodiment. The UV irradiation device comprises, for example, a chamber made of highly polished stainless steel with a UV-transparent quartz sleeve. The UV spectrum spans wavelengths from 100 nm to 400 nm. The band from 350 nm to 400 nm is referred to as UVA, the band from 280 nm to 320 nm as UVB and the band from 100 nm to 280 nm as UVC. The UV irradiation device is designed in such a way that the water flowing through the UV irradiation device is exposed to UV radiation. To generate the UV radiation, the UV irradiation device usually has a mercury vapor lamp, which preferably emits UV light having a wavelength of 254 nm (or exactly 253.7 nm). At this wavelength, the microorganisms present are killed or inactivated, and bacterial growth or contamination in the water treatment system can be prevented, with the germicidal maximum at 265 nm. The UV lamps used, for example, in particular low-pressure mercury vapor lamps, furthermore preferably emit UV light with a wavelength of 185 nm (or exactly 184.9 nm). Irradiation of the water to be purified with UV light of 185 nm leads to the conversion of the oxygen containing to ozone, which is converted into highly reactive hydroxyl radicals in conjunction with irradiation at 254 nm. These hydroxyl radicals allow the rapid oxidation of organic carbon to carbon dioxide and water (= UV oxidation state). In this way, therefore, a particularly efficient reduction of the TOC load in the water to be purified is possible. The UV irradiation device is preferably arranged upstream of the ultrafiltration stage in order to be able to filter out dead germs with respect to the direction of flow of the water through the plant for the production of ultrapure water following the UV irradiation from the water.

Basically, the hereby referred to plants for the production of ultrapure water of US 5,397,486 A . US 5,399,263 A and EP 1 637 207 A2 already well proven. However, it is still considered disadvantageous that the systems described there are comparatively maintenance-intensive, in order to enable continuous high-level performance. In addition, in particular, the UV irradiation device represents a significant cost factor, since the mercury vapor lamps commonly used as a UV radiation emitting light source are cost-intensive and not problem-free in environmental terms. At the same time, the life of these lamps is comparatively low, which considerably increases the maintenance required for operating such a high-purity water system. Another disadvantage is that the previously known UV irradiation facilities are relatively large, which in particular means that the previously known plants for the production of ultrapure water are relatively large. The sheer size of such UV irradiation facilities further requires that UV irradiation of the water to be purified is possible only at one point of the entire water cycle in the ultrapure water system. However, this fact is of particular disadvantage, especially in discontinuously operated ultrapure water systems, since in such cases often a microbial colonization of parts of the Ultrapure water system, in particular parts of the pipe system, can be observed.

On this basis, the invention thus has the task of specifying a plant for the production of ultrapure water, which is easier to maintain and cheaper in the production and purchase price and at the same time allows a reduction in the spatial dimensions of the ultrapure water system. The quality of the cleaning result should be maintained or even improved.

The object is achieved with a plant for the production of ultrapure water or a cartridge for use in a plant for the production of ultrapure water according to the independent claims. Preferred developments are specified in the dependent claims.

The essential idea of the invention lies in the fact that the at least one UV-emitting light source of the UV irradiation device is a UV-LED. The basic structure of an LED (light-emitting diode) is known from the prior art. In the following, LED designates the entirety of the electronic component. Typical elements of an LED are often a cathode, an anode, a reflector, an LED chip, a lead wire, a sheath, etc. The term LED thus includes in particular also, if present, the sheath of the UV-LED, for example, in may be of the type that it also acts as a lens, and in particular also corresponding power supply lines / connections (anode, cathode) in the LED interior etc. The characteristic of a UV LED over the general term LED is that this Emitted light with a lying in the UV spectrum wavelength. By using a UV LED, several advantages can be achieved in one fell swoop. On the one hand, UV LEDs are relatively inexpensive to produce and are characterized by their long life and outstanding resistance to breakage, which considerably reduces the maintenance required for operating a high-purity water system according to the invention. On the other hand, compared to the mercury vapor lamps used hitherto, UV LEDs are considerably smaller and lighter and also have a lower energy consumption. Also, a cooling of the UV irradiation device is no longer necessary because UV LEDs have virtually no or at least only a drastically reduced heat emission. Thus, the ultrapure water system can be made smaller in their entirety, which in particular the often confined space in the laboratory space benefits.

In the previous UV irradiation facilities with, for example, mercury vapor lamps, it was necessary to form entire areas, in particular large areas, the system for the production of ultrapure water for UV light permeable to ensure adequate irradiation of the water with UV rays. This required, for example, the use of corresponding quartz-made (and hence UV-transparent) regions, which greatly increased the costs of a plant for the production of ultrapure water resulting from the UV irradiation facility. In this connection, the invention proposes, in a preferred embodiment, that the UV LED projects at least partially into the water flowing through the UV irradiation device. This makes it possible to dispense with large, extensive and thus costly designs of the UV irradiation device in order to ensure a minimum level of UV transmission. Also, the use of UV-permeable special materials can be significantly reduced. Rather, the UV-LED can be arranged in such a way that it comes into direct contact with the water flowing through the UV-irradiation device or in other words is washed around by the UV-irradiation device. For this purpose, the UV-LED can be passed, for example, with its head through the wall of a pipe part. Alternatively, it is of course also possible to arrange the UV-LED directly inside a line part. It is essential for these embodiments of the invention that the UV radiation emitted by the UV LED strikes the water to be irradiated directly. Conduction parts of the UV irradiation device can therefore be made from conventional materials, such as are hitherto customary in plants for producing ultrapure water. Of course, it is also possible in principle to arrange the UV LED lying outside the line part, in which case a UV transmission of this line section is to be ensured.

Due to the small size of a UV LED, the invention makes it particularly well to simultaneously integrate several UV LEDs in the UV irradiation device, and even then the UV irradiation device can still be kept relatively small. The multiple UV LEDs can be positioned to each other in a variety of different arrangement variations. In a preferred embodiment, a plurality of UV LEDs are arranged side by side. In this case, juxtaposition means that the plurality of UV LEDs are adjacent to one another in at least one direction and in particular directly adjacent to one another. A preferred direction, for example, the flow direction of the guided past the UV LEDs water. Several next to each other arranged UV LEDs then form in their entirety an irradiation group of the UV irradiation device. This makes it possible to regulate the irradiation intensity in the area of the UV irradiation device by the number of UV LEDs. Of course, a UV irradiation device may also comprise a plurality of irradiation groups.

In order to ensure that the water flowing through the UV irradiation unit is exposed to at least sufficient UV radiation in the entire flow cross section, the UV irradiation unit preferably comprises a plurality of UV LEDs, which adjoin one another with respect to the cross section of the water-carrying line part of the UV irradiation device or are arranged opposite or circumferentially. The basic idea of this preferred embodiment is that the UV irradiation device can simultaneously irradiate water from several sides with UV light emitted by UV LEDs. This can be achieved in a comparatively simple manner, an even higher efficiency of the UV irradiation device.

The cross section of the conduit part in which the water is passed through the UV irradiation device may vary, in particular with regard to the shape and the dimensioning. Typical cross-sectional profiles are, for example, circular, ellipsoidal and rectangular. By definition, the cross section of the line part is related to the direction of flow of the water through this line part. The cross section results from the section through the line part orthogonal to the flow direction of the water in this line part. The irradiation of the water from several sides is achieved, for example, by arranging several UV LEDs adjacent to each other along the cross section. Several UV LEDs means at least two UV LEDs in this context. Further, the UV LEDs in this embodiment are preferably arranged to each other in such a way that they radiate from different sides to the water flowing through the conduit part. It is particularly advantageous to arrange the UV LEDs in such a way that they are arranged opposite one another with respect to the cross section of the line part. In this way it can be ensured particularly reliably that the entire water flowing through the line part is detected by the UV radiation. This succeeds particularly well if the UV irradiation device is designed in such a way that the UV LEDs are arranged in a manner that surrounds the cross section. This includes those embodiments in which the UV LEDs outside the cross section circulate the line part, but also those UV irradiation devices in which the various UV LEDs are arranged in a ring on the cross section or even within the cross section. It is thus crucial for this embodiment that the UV LEDs of the UV irradiation device have a substantially annular arrangement, so that the water flowing through the line part is simultaneously irradiated with the emitted UV radiation from several sides. Ensuring a complete and sufficient UV irradiation of the water flowing through the UV irradiation device is thus achieved particularly well with this embodiment.

As already stated above, one of the essential quality criteria for the purity of ultrapure water is the so-called TOC value, which is a measure of the organic carbon contained in the water. In particular, a very low TOC value is an important parameter for the classification of ultrapure water in Type I quality in accordance with the ASTM standard. For the determination and monitoring of the TOC value or content, it is known to integrate a TOC analyzer in a generic system for the production of ultrapure water, as described, for example, in US Pat EP 1 637 207 A2 is disclosed. The structure and operation of such a TOC analyzer are known in the art. In this context, the invention now provides in a preferred embodiment that the UV irradiation device comprises a measuring device and a control unit, wherein the measuring device at least the TOC content and / or the volume flow (ie, that water volume per unit time by a certain cross-sectional area flows) and the irradiation intensity of the UV irradiation device is regulated as a function of the TOC content and / or volumetric flow determined by the measuring device. For this purpose, it is possible, for example, that the TOC content is determined via UV absorption measurement (ratio of the UV radiation emitted by the UV irradiation device to the absorbed UV radiation) and the irradiation intensity of the UV irradiation device is regulated on the basis of the determined TOC content , so that a feedback between TOC content and UV irradiation intensity is achieved. The essential basic idea of this embodiment with measuring device and control unit is thus generally to make the intensity of the UV irradiation of the water dependent on measuring parameters acquired in situ or from the current cleaning process, in order in this way to improve the cleaning performance of the system to the respectively present one To be able to adjust the water quality. Control of the radiation intensity of the UV irradiation unit according to the invention is possible, for example, by switching on / off further UV LEDs. However, it is particularly easy to achieve almost stepless regulation by dimming the UV LEDs of the UV Irradiation device. Dimming is to be understood as meaning the almost continuous regulation of the current supply to the UV LED in order to be able to control the intensity of the UV radiation emitted by the UV LED almost continuously up and down. A typical control process provides, for example, that with an increase in the volume flow, the irradiation intensity of the UV irradiation device is also highly regulated by the control unit. This also applies, for example, to an increasing TOC content.

In principle, to determine the TOC value, the TOC analyzers known from the prior art can be integrated into a plant according to the invention for the production of ultrapure water and used to determine the TOC content. However, the TOC analyzer is preferably designed in such a way that it irradiates the TOC content of the water in the flow direction of the water in front of and behind the region (= irradiation region) in which the water from the UV light-emitting light source is irradiated with UV light is determined. In this way, it is possible with the aid of the TOC analyzer to determine a difference TOC value and, depending thereon, to regulate the effectiveness of the UV irradiation device or the irradiation intensity in the irradiation area. With this embodiment, therefore, a particularly precise control of the irradiation intensity of the UV irradiation device as a function of the TOC value is achieved. In addition, the ultrapure water system can independently respond to different output TOC values and adjust the power of the UV irradiation device accordingly via the control unit. Further possible controlled variables that can be used to control the irradiation power of the UV irradiation device are, for example, the removal quantity, the line length, the number of dispensers, etc.

The effectiveness of the UV irradiation device can be further increased according to the invention if it has at least one and preferably several irradiation chambers, wherein at least one of the irradiation chambers at least one UV-LED, preferably in each of the irradiation chambers, a UV-LED and particularly preferably in each of the irradiation chambers several UV LEDs are arranged. Of course, the number of irradiation chambers and in particular the number of UV LEDs per irradiation chamber is variable. An irradiation chamber describes a space through which the water to be purified flows and which has an enlarged cross-section with respect to the line part adjacent to the irradiation chamber. Due to the widening of the cross-section through which each chamber flows, the flow velocity of the water in an irradiation chamber is slowed down. Thus, the irradiation time of the water can be extended. In principle, the individual irradiation chambers can be interconnected in parallel. Ideal, however, is an arrangement of the individual irradiation chambers in series, i. H. the individual irradiation chambers are fluidly connected in series. In this embodiment, the water to be purified thus flows successively through the individual existing irradiation chambers. As a result, the water in this embodiment is irradiated several times in succession with UV radiation, depending on how many irradiation chambers are arranged in series with each other.

This arrangement principle can be varied in many ways. For example, it is possible that the UV radiation emitted by the existing UV LED in an irradiation chamber varies from irradiation chamber to irradiation chamber. In this way, different UV radiation wavelengths can be combined with one another in a UV irradiation device, but at the same time the UV LEDs per irradiation chamber are structurally uniform, which considerably simplifies the scope of maintenance, if at all necessary. Alternatively, UV LEDs that emit UV light of different wavelengths can be combined in an irradiation chamber, which can dramatically increase the performance of a single irradiation chamber with a favorable combination of different wavelengths of UV light used. Specific preferred combinations of wavelengths will be specified below.

A significant advantage of the use of at least one UV LED as the UV light emitting bulbs in the UV irradiation device is, as already mentioned above, inter alia, that the UV LED is relatively small and thus the overall size of the plant for the production of Ultrapure water can be reduced or kept small. Another advantage resulting from the small size of the UV-LED is that the UV-LED can be selectively and directly arranged directly and directly in a flow dead space of the plant for the production of ultrapure water, in particular in a flow dead space of a connection part (for example the water connection, a connector between piping, cartridge port, etc.), a cartridge inlet or outlet, a valve, a sensor, or a pump. In the present case, a flow dead space is to be understood as meaning a portion of the area through which the water flows in order to produce ultrapure water, in which only a greatly reduced, if any, flow-related exchange of the water takes place. The water to be purified "stands", so to speak, in one Dead space, even if the plant for the production of ultrapure water is traversed by water or is in operation. The emergence of dead spaces can be, for example, the result of turbulence in the water flow, of dead-end pipe parts, of a winding water flow or a twisted pipe system, etc. In plants for the production of ultrapure water, flow debris are of particular relevance, in particular with regard to possible germ growth. Because no or only a very weak exchange of water takes place in a flow dead space, such places in the ultrapure water system are predestined to have a vigorous growth of germs. In such a case, the ultrapure water system is virtually microbiologically contaminated from within. Flow debris is therefore particularly fatal in that it can lead to recontamination of already purified water.

The invention provides for the direct and immediate integration of a UV LED of the UV irradiation device in a flow dead space, in particular for the prevention of germ growth based on flow dead spaces. This is only possible by the use according to the invention of the small and at the same time radiation-intensive UV LEDs in a plant for producing ultrapure water. In particular, the integration of at least one UV-LED in a valve or a pump has been found to be particularly effective because these components of a plant for the production of ultrapure water never or only rarely replaced or renewed or cleaned. In this respect, it is precisely these components of a plant for the production of ultrapure water that are particularly susceptible to the emergence of germ growth. Other critical points with regard to potential flow dead spaces are also in particular connecting parts, for example, for the water inlet, the individual cleaning components / cartridges, the water outlet, etc., since it is particularly frequent spillage of germs that can be observed due to contamination occurring during the connection. If the plant for the production of ultrapure water has one or more replaceable cartridges, for example a cleaning cartridge or a final filter cartridge, the inlet and outlet ports of the cartridges are also typical locations at which there is the occurrence of flow dead spaces and thus an increased risk of germ growth. It is therefore particularly expedient to arrange at least one UV LED of the UV irradiation device at the inlet and / or outlet port of the cartridge and the water flowing through the input and / or output port of the UV radiation emitted by the at least one UV LED suspend.

Another advantage of using a UV LED in a high purity water plant is that UV LEDs typically emit a narrow band spectrum. Under narrow band is to be understood as the width of an emission band in the range of 5 to 100 nm and in particular from 10 to 40 nm. The width of the emission band refers to the half-width of the emission band. The use of a UV LED in the UV irradiation unit has proved to be particularly favorable, the UV light having a wavelength in the range 180 nm to 370 nm, very particularly 240 nm to 370 nm, in particular of substantially 254 nm, 265 nm , 280 nm, 310 nm or 340 nm, emitted. The wavelength specification refers to the wavelength in the emission maximum. "Substantially" also refers to the emission maximum of the emission spectrum of the respective UV-LED and in particular comprises a range of +/- 10 nm, especially +/- 5 nm and especially +/- 2 nm. Alternatively, the use of a UV Particularly preferably emits UV light having a wavelength in the range of 180 to 220 nm, in particular of substantially 185 nm. The latter wavelength is particularly suitable for generating ozone, as already mentioned above.

The cleaning effect of a plant according to the invention for the production of ultrapure water can be further increased if the UV irradiation device is designed in such a way that at least two UV light emitting light sources are present, wherein the UV light emitting light source with a UV light Wavelength and the other UV light emitting light source emits UV light with a different wavelength and at least one of the two UV light emitting light sources is a UV LED. It is thus essential for this embodiment that the UV irradiation device combines a plurality of different UV wavelengths with each other, thereby enabling an increase in efficiency. It is preferred if the different wavelengths of the UV irradiation device are each emitted by a UV LED. Thus, in this preferred embodiment, at least two UV LEDs that emit UV light at different UV wavelengths are combined. With regard to the cleaning effect of the UV irradiation device, for example, the combination of a UV light emitting light source, in particular a UV LED, the UV light having a wavelength in the range of 180 nm to 210 nm, in particular of substantially 185 nm, emitted with a UV-LED which emits UV light having a wavelength in the range of 240 nm to 370 nm, in particular 255 nm to 370 nm, very particularly 265 nm, together in a UV irradiation unit is particularly preferred. In this way, it is possible at the same time to inhibit the growth of germs and existing organic To reduce components by the generation of ozone and hydroxyl radicals according to the mechanism mentioned in the introduction.

Basically, the use of a replaceable cartridge has proven to be advantageous in the operation of a generic system for the production of ultrapure water, wherein cartridge presently designated for replacement structural unit of the plant for the production of ultrapure water, in particular a cleaning cartridge or a final filter. For the basic structure of such a cartridge and its integration into a plant for the production of ultrapure water is hereby made reference to the three previously cited documents. Basically, the cartridge comprises a housing with a water inlet through which water to be purified can be introduced into the cartridge, and a water outlet from which the water can emerge from the cartridge. The cartridge is integrated into the water flow in the plant for the production of ultrapure water via suitable connection means.

The invention now provides in a further aspect that the cartridge comprises a UV irradiation device with a UV light emitting UV LED, which is arranged in or on the cartridge in such a way that the water flowing through the cartridge with that of the UV LED emitted UV light is irradiated. The specific arrangement of the UV irradiation device with a UV light emitting UV LED can vary. Thus, for example, arrangement alternatives are also possible in this embodiment, in which the UV-LED projects directly into the water to be purified or in which the UV-LED are embedded in the cartridge housing. It is also crucial here that another essential basic idea of the invention is thus to arrange the UV irradiation device in such a way that the UV radiation emitted by the UV irradiation device acts directly on the water flowing through the cartridge. The UV irradiation device and the cartridge thus form a functional unit in this embodiment, so that the UV irradiation of the water and the task to be performed by the cartridge or the cartridge filling are fulfilled in parallel.

For this purpose, fundamentally different arrangement possibilities of the UV irradiation device or of the UV LED relative to the cartridge are possible. On the one hand, the UV irradiation device can be attached to the cartridge or placed in the cartridge after installation of the cartridge in the plant for producing ultrapure water. Cartridge and UV irradiation device are in this embodiment thus initially two separate units that are assembled only in the context of the insertion of the cartridge in the ultrapure water system to a common functional unit. However, it is preferred if the UV LED of the UV irradiation device is firmly integrated in the cartridge, in particular in the housing of the cartridge. The cartridge and the UV irradiation device or the UV LED thus form a structural unit (wherein the electrical power supply, connections for electrical power supply, etc. are preferably permanently installed in the ultrapure water system according to the invention, to the insertion of the cartridge also equal to the operation to ensure the UV irradiation device in the cartridge). With the cartridge, the UV LED of the UV irradiation device is therefore also replaced in this embodiment and renewed by the use of a new cartridge in the plant for the production of ultrapure water. In this embodiment, it is thus ensured that the UV LED is renewed at regular intervals.

The specific arrangement of the UV-LED on or in the cartridge or on the cartridge housing may vary. Of course, it is possible to make UV-permeable parts of the housing of the cartridge and to arrange the UV-LED on the outside of the housing easily accessible from the outside. However, it is preferred to arrange the UV-LED in or on the cartridge in such a way that it projects at least partially into the housing interior of the cartridge through which water flows. In this way, a direct contact of the UV-LED is given with the water passing through the cartridge, so that it can be dispensed with, for example, the use of special and expensive UV-transparent materials for the production of the cartridge housing.

Outstanding cleaning results are also achieved if at least one UV LED at the water inlet of the cartridge and / or at least one UV LED is arranged at the water outlet of the cartridge. In general, there is a problem with using a cartridge in an ultrapure water plant, where there is a particularly high level of flow dead space and / or materials that provide favorable conditions for germination. As a result, cartridges often contribute to the reduction of certain contaminants, but at the same time result in an increase in other contaminants, such as the microbial load on the water to be purified. This problem can be circumvented particularly elegantly with the present invention, since the cartridge can be easily equipped with multiple UV LEDs. Such a "mass" integration of UV-emitting bulbs in the ultrapure water system is only possible because UV LEDs are comparatively small, low energy consumption have and are inexpensive to manufacture and purchase. The arrangement of a UV LED on the water inlet of a cartridge can be ensured that the entry of potentially reproducible bacteria is minimized in the cartridge. By contrast, an arrangement of a UV LED on the water outlet ensures that the bacteria which may have been flushed out of the cartridge before being discharged from the cartridge are, for example, killed in the line system of the plant for the production of ultrapure water. If at least one UV LED is positioned at the cartridge inlet and at least one further UV LED is positioned at the water outlet, these two positive effects can be combined with one another. Further preferred embodiments further provide for arranging a UV LED in the middle of the cartridge or in the middle of the water flow through the cartridge or to combine several arrangement locations of UV LEDs in the cartridge in addition to the cartridge inlet and outlet.

The inventive concept of combining a UV LED with a cartridge is particularly suitable when the cartridge is a cleaning cartridge with a recorded in the interior of the housing cleaning medium. Cleaning cartridges have the task to remove impurities from the water to be purified and flowing through them. It is known that, especially in cleaning cartridges, depending on their filling, excessive germ growth can be observed. This makes the control and permanent reduction of the bacterial load of the water in a plant for the production of ultrapure water extremely difficult. The invention solves this problem insofar as that the UV irradiation device can be arranged in relation to the cleaning cartridge so that the interior of the cartridge is irradiated directly with UV light. Thus, the growth-inhibiting effect of UV radiation (and, depending on the version, the ozone and Hydroxylradikale generating effect of certain UV light wavelengths / combinations) can be used directly at the site of germ growth. Accordingly, for example, the service life of a cleaning cartridge according to the invention, in particular with integrated into the cleaning cartridge UV LED can be improved. It goes without saying that this effect can be increased even more if several UV LEDs are arranged at different locations of the housing of the cleaning cartridge or of the interior of the cleaning cartridge. In extreme cases, it is even possible to choose the number and placement of the UV LEDs so that almost the entire interior of a cartridge is illuminated or irradiated with UV light.

A further preferred field of use of a cartridge according to the invention is the use as a final filter with a filter medium arranged inside the housing, in particular a hollow-fiber medium whose maximum pore diameter is preferably less than 0.2 μm and particularly preferably does not exceed a pore diameter of 0.05 μm. Such final filters are often surface filters or membrane filters whose filter surface is particularly susceptible to microbial colonization. This is particularly disadvantageous in that already run through the plant for the production of ultrapure water and thus "finished" purified water in the last step, namely the Endfilterstufe before the water outlet, again with bacteria or bacterial debris can be contaminated. To avoid this phenomenon, the idea according to the invention can also be realized particularly efficiently here by integrating a UV irradiation device with a UV light-emitting UV LED into the cartridge of the final filter. In this way, excessive bacterial colonization of the filter medium can be prevented and reduced in a sustainable and efficient manner.

It is particularly advantageous if the UV irradiation device is arranged in the flow direction behind the filter medium of the final filter. This side of the filter medium, which is remote from the flow direction of the water of the plant for the production of ultrapure water, is particularly susceptible to microbial colonization.

The invention will be further explained with reference to the exemplary embodiments illustrated in the figures. They show schematically:

1 a perspective oblique view of a plant for the production of ultrapure water;

2 a schematic diagram of the plant for the production of ultrapure water according to 1 ;

3 a partial sectional view of the interior of a cartridge;

4a and 4b alternative embodiments of a cartridge;

5 a final filter cartridge;

6a to 6d alternative embodiments of a UV irradiation unit;

7a and 7b different views of an irradiation cuff;

8th a sectional view of a UV irradiation unit with three irradiation chambers; and

9 an arrangement of UV LEDs in Strömstoträumen.

In the embodiments shown below, the same components are provided with the same reference numerals.

The plant for the production of ultrapure water 1 (hereafter as attachment 1 designated) according to 1 includes a housing 2 with a door 3 about which the interior 4 the plant 1 is accessible. In the interior 4 is a cleaning unit 5 with several cleaning cartridges 8th arranged, with the individual cleaning cartridges 8th via a connection cover 9 and a connecting floor 10 are connected in such a way that the water to be cleaned, the individual cleaning cartridges 8th flows through. For this purpose, in particular the plant for the production of ultrapure water according to the EP 1 637 207 A2 Referenced. The attachment 1 further comprises a display and input device 6 , via which the corresponding operating parameters can be displayed and set. Furthermore, a final filter cartridge 7 present, over whose outlet water from the plant 1 can be tapped.

The principle of operation of the system 1 according to 1 is in 2 clarified in more detail. To be cleaned water is over the water inlet 11 according to arrow A in the annex 1 fed. At the water inlet 11 closes a backflow barrier 12 (eg a check valve etc.). To the in the plant 1 To be able to detect the amount of water fed in is a sensor 13 available over which the flow rate can be determined. The pipe system 14 (for clarity, the power system 14 only occasionally in 2 designated by the reference numeral; basically, all those parts belong to the pipe system 14 representing the individual components of the plant 1 connect together or forward the water from one component to the next) is connected to a pump 15 connected to the circulation of water in the plant 1 effected in the flow circuit marked with the arrows B. Alternatively or additionally, a control via a pressure regulator 16 possible. The water is then placed in the filter assembly 5 initiated (symbolized by the dashed frame) and passes in series, the four cleaning cartridges 8th the cleaning unit 5 , Between the penultimate and the last cleaning cartridge 8th is a UV irradiation device 17 into the pipe system 14 integrated. Before the water thus the last cleaning cartridge 8th achieved, it is the by the UV irradiation device 17 exposed to emitted UV radiation. After the last cleaning cartridge 8th the water in the cleaning cycle according to the arrows B, a detergent inlet, via the optional detergent can be injected into the indicated by the arrows B water cycle. The water then passes to the TOC analyzer 19 and to a temperature and resistance cell 20 , To the connection 21 , via which the water cycle can optionally be connected to a dispensing gun, the water gets to the distributor 22 that either via the additional check valve 23 feeds into the circulation or to the outlet cartridge 7 conducts a final filter stage 24 and a water outlet 25 includes. Over the water outlet 25 can water from the plant 1 be tapped according to arrow C. For further details of the basic operation of the system 1 Reference is made in particular to the documents cited above in the description, to which reference is expressly made in this regard. The with a * in 2 indicated points also indicate alternative positions, which are particularly suitable for integration of the UV irradiation device 17 are. It is of course also possible in the system 1 several, in particular the marked with * points with a UV irradiation device 17 or one or more UV LEDs. This will be explained in more detail below with reference to several embodiments.

First, however, is the basic structure of a cleaning cartridge 8th in 3 specified, where only the essential components are identified by reference numerals. For more details of in 3 shown cleaning cartridge 8th will be related to the EP 1 637 207 A2 taken. The cleaning cartridge 8th comprises a hollow cylindrical housing body 26 with a bottom closure 27 and a lid closure 28 , The water to be purified is in the direction of arrow D through the cartridge inlet 29 in the with cleaning medium 30 (For example, activated carbon or ion exchange resin, etc.) filled interior of the cleaning cartridge 8th fed. The cleaning medium 30 is up and down, each with a comparatively coarse-mesh filter cartridge 31 respectively. 32 that is between the ground 27 or lid 28 and the cartridge case 26 is trapped, limited. The 3 shows the cleaning cartridge 8th with bottom pulled down. In operation, the bottom is on the housing 26 postponed. This is the cleaning medium 30 continuous water kick in the pipe 33 and will go over the cartridge exit 34 in the direction of arrow E from the cleaning cartridge 8th derived.

According to 2 in particular, the cleaning cartridge is suitable 8th for receiving the UV irradiation device 17 , The concrete arrangement of the UV-LED UV irradiation device 17 however, in the cleaning cartridge may also vary. Preferred locations are in 3 also marked with * and will be explained in more detail below.

The 4a and 4b each show a cleaning cartridge 8th in longitudinal section view, which in its basic structure comparable to the in 3 shown cleaning cartridge 8th is. The main difference of the cleaning cartridge 8th according to the 4a and 4b in comparison to the cleaning cartridge according to 3 is located (besides a different water flow in the cleaning cartridge) in that the cleaning cartridges 8th of the 4a and 4b each an integrated UV irradiation device 17 exhibit. In both embodiments, the water to be purified in the direction of arrow D via the cartridge inlet 29 into the interior of the cleaning cartridge 8th fed. There it first passes through the left-hand cleaning medium 30 and enters the bottom of the cleaning cartridge 8th in the open space 35 out. There the water gets into the right cleaning medium 30 deflected (indicated by the curved flow arrow) and finally enters the direction of arrow E from the exit 34 again from the cleaning cartridge 8th out.

In 4a the UV irradiation unit is now arranged in such a way that it passes through the free space 35 flowing water is irradiated with UV radiation. A variety of UV LEDs 36 (Not all UV LEDs are marked with a reference numeral) is arranged on the bottom of the cartridge, and they cover this almost completely. The individual UV LEDs lie next to each other and protrude into the water-filled free space 35 directly into it. The UV LEDs 36 are thus at least partially directly from the cleaning cartridge 8th flowing through the water or are in direct contact with the water. The individual UV LEDs 36 the UV irradiation device 17 are also connected to an electrical power supply and are controlled by a control unit (not shown). In 4a and also in the following figures are with respect to the power supply of the UV LEDs 36 only the individual connections of the UV LEDs visible. However, further details in connection with the connection and the electrical power supply of the UV LEDs are not given in the figures for the sake of clarity.

An alternative arrangement of the UV irradiation device 17 in a cleaning cartridge 8th is in 4b shown. The UV irradiation device 17 is in this embodiment in several radiation groups 17a . 17b and 17c split, each containing several UV LEDs 36 include and at different locations of the cleaning cartridge 8th are arranged. In contrast to the embodiment according to 4a Thus, in particular, the behind the cartridge inlet 29 and in the flow direction in front of the cartridge outlet 34 lying clearance through the UV LEDs 36 of the radiation groups 17a respectively. 17b irradiated. In addition, here is an irradiation group 17c in the bottom area of the cleaning cartridge 8th specifically located in the area where the water from the relative to the water supply in the cleaning cartridge 8th descending left side to the ascending right side. With the cleaning cartridge 8th according to 4b Thus, particularly outstanding cleaning results can be achieved because the dead spaces 37 in the area of the water inlet 29 and in the area of the water outlet 34 , in particular in the local corners to the housing, are irradiated with UV light. Microbial growth in this area is thus considerably more difficult.

5 shows details of the final filter cartridge 7 out 2 , The final filter cartridge 7 represents the last cleaning stage of the plant 1 before the water comes out of the system 1 exit. Also the final filter cartridge 7 includes a housing 38 with a water inlet 39 , over the water in the direction of arrow D into the housing interior of the final filter cartridge 7 is fed. Inside the housing of the final filter cartridge 7 is a filter medium 40 arranged, which is a hollow fiber filter medium having a pore diameter of less than 0.2 microns (preferably of at most <0.05 microns). After the water in the final filter cartridge 7 the filter medium 40 Has happened (indicated by the dashed arrow), it will be over the case 38 arranged water outlet 41 from the plant 1 drained and is thus available for further use. According to the embodiment in 5 is a UV irradiation device 17 in the case 38 the final filter cartridge 7 integrated. The individual UV LEDs 36 are each in pairs overlying each other and ring around the housing 38 arranged around. The UV LEDs 36 each protrude with their tip area into the housing interior of the final filter cartridge 7 into it, allowing immediate contact of the UV LED 36 with the in the final filter cartridge 7 contained water. Another essential feature of the final filter cartridge 7 is further that the UV irradiation device 17 in the flow direction (ie from D in the direction E) behind the filter medium 40 are arranged. A microbial colonization of the filter medium 40 From the outside of the filter medium or microbial growth on the outside of the filter medium is thus by this special positioning of the UV irradiation device 17 prevented or at least drastically reduced.

In the embodiments according to the 6a to 6d is the UV irradiation device 17 in contrast to the previous embodiments in the piping system 14 integrated. 6a is a longitudinal section through a part of the pipe system 14 , The flow direction is indicated by the arrows. 6b shows the embodiment according to 6a in a Cross-sectional view according to section line I. 6c concerns in comparison to 6b an alternative arrangement of the UV irradiation device 17 in the pipe system 14 , Essential for the embodiment according to the 6a and 6b is that the UV irradiation device 17 Two UV LED groups are included in the wall of the pipe system 14 are integrated and protrude with their top areas each in the line interior. The two groups of UV LEDs 36 are doing according to 6b arranged opposite each other. Each UV LED group includes four UV LEDs 36 , which are adjacent in the flow direction and adjacent to each other in the wall of the conduit system 14 are admitted.

According to the alternative embodiment 6c The individual UV LEDs can also be arranged annularly around the line cross section. The individual UV LEDs 36 in the embodiment according to 6c are in the way in the line system 14 integrated, that they protrude with their top area in the wall material. To that the management system 14 Thus, in order to be able to irradiate water flowing through with UV rays, it is necessary in this embodiment that the line system 14 at least in the area of the UV irradiation device 17 Made of a UV-transparent material. The same applies in principle to the further alternative arrangement 6d in which the individual UV LEDs 36 are arranged around the wall material of the pipe section around, without even partially submerge in the wall.

In a further alternative embodiment according to the 7a and 7b is the UV irradiation device 17 as a cuff 41 formed around a part of the pipe system 14 is laid around. The cuff 41 has two cuff halves 41a and 41b on, in each of which UV LEDs are integrated. The UV LEDs are in this embodiment in the cuff 41 let in that with their lace area flush with the inner coat of the manchangers 41 to lock. This embodiment is particularly suitable for retrofitting a UV irradiation device 17 in a plant 1 because the cuff 41 just around a part of the pipe system 14 can be put around. Prerequisite for effective UV irradiation by this part of the pipe system 14 However, the water passed through is that of the piping system 14 also here consists of a UV-transparent material.

8th schematically shows a UV irradiation device 17 that have two measuring devices 42 and 43 includes. measuring device 42 is in front and measuring device 43 is in the flow direction of the water through the UV irradiation device 17 behind the three UV irradiation chambers 44 arranged. The arrows D and E indicate the flow direction in which the water to be purified through the device 8th flowing. Furthermore, the UV irradiation device 17 out 8th a control unit 45 on which the UV irradiation device 17 controls. The control unit processes this 45 that of the measuring equipment 42 and 43 determined measured data, such as the TOC value of the water, the volume flow, etc. Depending on the measured values determined and in particular in response to the determined difference value between the two measuring devices 42 and 43 regulates the control unit 45 in the individual irradiation chambers 44 arranged groups of UV LEDs 36 , This is indicated by the dashed arrows in 8th played. The regulation by the control unit 45 can, for example, the switching on and off of individual UV LEDs 36 entail how it is in 8th is shown by the black (for off) and white (for on) colored UV LEDs. Alternatively, the control unit 45 be designed in such a way that it dimms the individual UV LEDs, so steplessly regulated up or down in terms of their emission intensity.

Another essential feature of the UV irradiation device 17 according to 8th is that the individual irradiation chambers 44 in comparison to the pipe system 14 have a widened flow cross-section, whereby the flow velocity in the individual irradiation chambers 44 is lowered. As a result, the water to be irradiated lingers longer in the individual irradiation chambers 44 so that, as a result, better irradiation results can be achieved. It is further envisaged that the individual groups of UV LEDs 36 emit UV light with different wavelengths per chamber. So are the UV LEDs 36 the left irradiation chamber 44 and the right irradiation chamber 44 formed in such a way that they emit UV light having a longer wavelength (for example, substantially 265 nm). The UV LEDs 36 in the middle irradiation chamber 44 on the other hand emit short-wave UV light (for example, with a wavelength of substantially 185 nm), so that on the one hand the inactivation of bacteria, etc. and at the same time the generation of ozone and hydroxyl radicals is possible. In a further preferred embodiment, not shown, the short-wave UV light in the middle chamber is emitted by a conventional UV light source (or no UV LED).

Another significant advantage of the invention is that UV LEDs targeted in dead spaces of the plant 1 , in particular in individual components, can be arranged. This is in 9 specified by way of example. 9 shows a partial section of a valve 46 , The water enters the valve 46 according to the arrow D on and out of the valve according to arrow E. Functionally, the valve has 46 in the part to be flowed through by water, sac lane-like omissions due to turbulence (by the two vortex arrows in 9 indicated) dead spaces 37 for the water flowing through the valve. In particular, these dead spaces 37 are particularly susceptible to microbial growth due to reduced or excluded water exchange. According to the embodiment of 9 The invention solves this problem by adding individual or groups of UV LEDs 36 specifically in these dead spaces 37 be used or placed so that the dead spaces 37 be irradiated with the emitted UV light. This is a continuous UV irradiation of the water in the dead spaces 37 possible, whereby a bacterial growth can be specifically reduced. It goes without saying that for this application in particular UV LEDs 36 which emit UV radiation at a wavelength which allows a particularly effective inhibition of bacterial growth. In the 9 used UV LEDs 36 Therefore, it is preferable to emit UV light having a wavelength near 260 nm, more preferably 265 nm.

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• US 5397468 A [0004, 0005]
• US 5399263 A [0004, 0005, 0007]
• EP 1637297 A2 [0004]
• EP 1637207 A2 [0005, 0007, 0015, 0042, 0044]
• US 5,397,486 A [0007]

Claims (15)

Plant for the production of ultrapure water ( 1 ), comprising at least the elements a) to d): a) an inlet ( 11 ) for water to be purified, b) a cleaning unit ( 5 ) used to reduce the pollution load of the cleaning unit ( 5 ) flowing water is formed, c) a UV irradiation device ( 17 ) with at least one UV-emitting light source, which is used for irradiating the light emitted by the UV irradiation device ( 17 ) of flowing water, and d) an outlet ( 21 ), over which the ultrapure water obtained from the plant ( 1 ) can be tapped; the plant ( 1 ) a conduit system ( 14 ), which separates the water from the inlet ( 11 ) with the interposition of cleaning unit ( 5 ) and UV irradiation device ( 17 ) to the outlet ( 21 ), characterized in that the at least one UV-emitting light source a UV-LED ( 36 ). Plant for the production of ultrapure water ( 1 ) according to claim 1, characterized in that the UV LED ( 36 ) at least partially into the UV irradiation device ( 17 ) protruding water protrudes. Plant for the production of ultrapure water ( 1 ) according to one of the preceding claims, characterized in that the UV irradiation device ( 17 ) several UV LEDs ( 36 ), which are arranged side by side. Plant for the production of ultrapure water ( 1 ) according to one of the preceding claims, characterized in that the UV irradiation device ( 17 ) several UV LEDs ( 36 ), which with respect to the cross section of the water flowed through line part of the UV irradiation device ( 17 ) are adjacent to each other or opposite or circumferentially arranged. Plant for the production of ultrapure water ( 1 ) according to one of the preceding claims, characterized in that the UV irradiation device ( 17 ) a measuring device ( 42 . 43 ) and a control unit ( 45 ), the measuring device ( 42 . 43 ) is designed to determine at least the TOC content or the volume flow, and the control unit ( 45 ), the irradiation intensity of the UV irradiation device ( 17 ) depending on the determined TOC content or volume flow. Plant for the production of ultrapure water ( 1 ) according to one of the preceding claims, characterized in that the UV irradiation device ( 17 ) several irradiation chambers ( 44 ), which are arranged in series with each other, wherein in the irradiation chambers ( 44 ) at least one UV-LED ( 36 ) is arranged. Plant for the production of ultrapure water ( 1 ) according to one of the preceding claims, characterized in that the UV LED ( 36 ) of the UV irradiation device ( 17 ) in a flow dead space ( 37 ) is arranged, in particular in a flow dead space ( 37 ) of a connection part, of a cartridge input ( 29 ) or -outgoing ( 34 ), a valve ( 46 ), a sensor or a pump ( 15 ). Plant for the production of ultrapure water ( 1 ) according to one of the preceding claims, characterized in that the UV LED ( 36 ) of the UV irradiation unit ( 17 ) is formed in such a way that it UV light having a wavelength in the range of 180 nm to 370 nm, more particularly from 240 nm to 370 nm, in particular 254 nm, 280 nm, 310 nm or 340 nm or from 180 nm to 220 nm, emitted. Plant for the production of ultrapure water ( 1 ) according to claim 8, characterized in that the UV irradiation unit ( 17 ) comprises at least two UV light emitting light sources which emit UV light of different wavelength, wherein at least the one UV light emitting light source the UV LED ( 36 ). Plant for the production of ultrapure water ( 1 ) according to one of the preceding claims, characterized in that it comprises a replaceable cartridge ( 7 . 8th ) according to one of claims 11 to 15. Cartridge ( 7 . 8th ) for use in a plant for the production of ultrapure water ( 1 ), in particular a plant according to one of claims 1 to 10, comprising a housing ( 26 . 38 ), a water inlet ( 29 . 39 ) and a water outlet ( 34 . 41 ), characterized in that the cartridge ( 7 . 8th ) a UV irradiation device ( 17 ) with a UV light emitting UV LED ( 36 ), which in the manner in the cartridge ( 7 . 8th ) is arranged that through the cartridge ( 7 . 8th ) flowing water with that of the UV-LED ( 36 ) emitted UV light is irradiated. Cartridge ( 7 . 8th ) according to claim 11, characterized in that the UV LED ( 36 ) firmly into the cartridge ( 7 . 8th ), in particular in the housing ( 26 . 38 ) of the cartridge ( 7 . 8th ). Cartridge ( 7 . 8th ) according to one of claims 11 or 12, characterized in that the UV LED ( 36 ) protrudes into the housing interior. Cartridge ( 7 . 8th ) according to one of claims 11 to 13, characterized in that the cartridge ( 7 . 8th ) at least one UV-LED ( 36 ) at the water inlet ( 29 . 39 ) of the cartridge ( 7 . 8th ) and at least one UV LED ( 36 ) at the water outlet ( 34 . 41 ) having. Cartridge ( 7 . 8th ) according to one of claims 11 to 14, characterized in that the cartridge ( 7 . 8th ) a cleaning cartridge ( 8th ) with one inside the housing ( 26 ) received cleaning medium ( 30 ) or a final filter ( 7 ) with one inside the housing ( 38 ) arranged filter medium ( 40 ), in particular hollow-fiber medium whose maximum pore diameter is less than 0.2 μm.

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